The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
May. 25, 2004
Yoshiaki Ohbayashi, Nara, JP;
Mamoru Yasuda, Kobe, JP;
Shinichi Saeki, Kashiwara, JP;
Masatsugu Komai, Nishinomiya, JP;
Kenichi Kagawa, Kawasaki, JP;
Yoshiaki Ohbayashi, Nara, JP;
Mamoru Yasuda, Kobe, JP;
Shinichi Saeki, Kashiwara, JP;
Masatsugu Komai, Nishinomiya, JP;
Kenichi Kagawa, Kawasaki, JP;
Hosiden Corporation, Osaka, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A sound detecting mechanism is provided which forms a diaphragm with a required thickness by thickness control and yet restrains distortion of the diaphragm to provide high sensitivity. The sound detecting mechanism comprises a pair of electrodes forming a capacitor on a substrate A in which one of the electrodes is a back electrode C forming perforations Ca therein corresponding to acoustic holes and the other of the electrodes is a diaphragm B. The diaphragm B is mounted on the substrate A while the back electrode C is mounted in a position opposed to the diaphragm B across a void F to be supported by the substrate A, the back electrode C being formed by polycrystal silicon of 5 μm to 20 μm in thickness.