The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
Jan. 08, 2007
Applicants:
Brian Warren, Reno, CA (US);
Edward Oldynski, Martinez, CA (US);
Scott Gehlke, Berkeley, CA (US);
Inventors:
Assignee:
MKS Instruments, Alameda, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02H 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A feedback architecture for ionizers that allows simultaneous adjustment of positive and negative ionizer power supplies. Balance and swing data are fed back to the ionizer through an intermediate module, which permits an extra level of signal processing. Swing information is returned to both power supplies in negative feedback mode. If swing is too high, both power supplies lower output. Balance is fed back in both negative and positive feedback mode. This architecture is compatible with multiple sensors and multiple ionizers.