The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
Oct. 20, 2004
Kazuhiko Ooshima, Kumamoto, JP;
Yuichi Terashita, Kumamoto, JP;
Momoko Shizukuishi, Tokyo, JP;
Hideo Shite, Kumamoto, JP;
Kousuke Yoshihara, Kumamoto, JP;
Kazuhiko Ooshima, Kumamoto, JP;
Yuichi Terashita, Kumamoto, JP;
Momoko Shizukuishi, Tokyo, JP;
Hideo Shite, Kumamoto, JP;
Kousuke Yoshihara, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A heat-treating apparatus comprises a table having a heating element buried therein, a plate-like target object to be processed being disposed on the table so as to be heated to a prescribed temperature, a support member for supporting the target object and movable in the vertical direction relative to the table such that the support member is moved to permit the target object supported by the support member to be disposed on the table or is moved away from the table, a cover surrounding the upper portion of the table, and a casing surrounding the lower portion of the table and combined with the cover so as to form a process chamber. When the process chamber is opened, the support member permits the target object to be housed inside the cover.