The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
Jun. 10, 2005
Katsuya Okumura, Tokyo, JP;
Toshiyuki Matsumoto, Amagasaki, JP;
Naoki Ikeuchi, Amagasaki, JP;
Masami Yakabe, Amagasaki, JP;
Katsuya Okumura, Tokyo, JP;
Toshiyuki Matsumoto, Amagasaki, JP;
Naoki Ikeuchi, Amagasaki, JP;
Masami Yakabe, Amagasaki, JP;
Octec Inc., Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Test sound wave is outputted from a speaker. A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker, that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via a probe needles. A control part determines the property of the three-axis acceleration sensor on the basis of the measured property values, that is, measured data.