The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 03, 2008

Filed:

Jan. 30, 2007
Applicants:

Tomonori Goto, Sapporo, JP;

Soichi Kadowaki, Kawasaki, JP;

Naoji Horiuchi, Kawasaki, JP;

Jyota Miyakura, Kawasaki, JP;

Inventors:

Tomonori Goto, Sapporo, JP;

Soichi Kadowaki, Kawasaki, JP;

Naoji Horiuchi, Kawasaki, JP;

Jyota Miyakura, Kawasaki, JP;

Assignee:

Mitutoyo Corporation, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A correction method for correcting measurement error in data obtained when a stylus tip of a measurement apparatus that moves following the height of a workpiece traces the workpiece along a measurement axis, the measurement error having occurred due to stylus movement in a plane defined by the measurement axis and height directions, the method includes a calibration measurement process of obtaining calibration measurement data that includes shift information on the position of the stylus tip, corresponding to the position of the stylus tip in the height directions while the stylus is moved in the correction target plane and a correction-parameter setting process obtaining a correction parameter value optimal to correct the shift information on the position of the stylus tip, included in the calibration measurement data, for each of the sectors obtained by dividing a measurement range in the height directions.


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