The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2008
Filed:
Oct. 18, 2004
Lawrence R. Miller, Los Altos, CA (US);
Krishnamurthy Bhaskar, San Jose, CA (US);
Mark J. Roulo, Mountain View, CA (US);
Arrigo Benedetti, Oakland, CA (US);
Lawrence R. Miller, Los Altos, CA (US);
Krishnamurthy Bhaskar, San Jose, CA (US);
Mark J. Roulo, Mountain View, CA (US);
Arrigo Benedetti, Oakland, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
An inspection system having a sensor array that provides image data. A process node includes a memory to receive the image data, a commercially available central processing unit to receive and coprocess at least a first portion of the image data within the memory, and a field programmable gate array to receive and coprocess at least a second portion of the image data within the memory. In this manner, there are two elements in the process node that are used to simultaneously process the image data, and the image data analysis thereby proceeds at a much faster rate than it would with just a single processor in a commercially available computer. However, the system as described has very little custom hardware, and thus is relatively inexpensive, and highly versatile.