The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2008
Filed:
Aug. 26, 2005
Applicants:
Michael L. Young, San Jose, CA (US);
Christopher F. Bevis, Los Gatos, CA (US);
Inventors:
Michael L. Young, San Jose, CA (US);
Christopher F. Bevis, Los Gatos, CA (US);
Assignee:
KLA-Tencor Corporation, San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/225 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microscope that produces magnified images of a sample. An observing component generates image data from the sample, and a moving component generates relative movement between the sample and the observing component. A sensor independently generates position data directly from the sample. A controller receives the image data from the observing component and the position data from the sensor, and applies the position data to correct special relations between the image data.