The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2008
Filed:
Oct. 16, 2003
Daniel Alvarez, Jr., San Diego, CA (US);
Jeffrey J. Spiegelman, San Diego, CA (US);
Russell J. Holmes, Santee, CA (US);
Daniel Alvarez, Jr., San Diego, CA (US);
Jeffrey J. Spiegelman, San Diego, CA (US);
Russell J. Holmes, Santee, CA (US);
Entegris, Inc., Chaska, MN (US);
Abstract
The invention is a method for the decontamination of COto a sufficient level of purity to allow it to be used in the semiconductor industry. The invention comprises the exposure of fluid COto a combination metallic states of at least one metal under the appropriate conditions for removal of contaminants. The adsorbents are then decontaminated/activated to return the adsorbent to a mixed oxidation state and allow further rounds of decontamination. The adsorbents are selected to be complimentary to each other, preferentially adsorbing different contaminants. Additionally, the adsorbents are selected to undergo reduction differently such that upon regeneration only a portion of the metals are reduced and the adsorbent is returned essentially to its original state.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile