The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Apr. 30, 2004
Richard Joseph Bruls, Eindhoven, NL;
Orlando Serapio Cicilia, Eindhoven, NL;
Hendrikus Alphonsus Ludovicus Van Dijck, Veldhoven, NL;
Gerardus Carolus Johannus Hofmans, Eindhoven, NL;
Tammo Uitterdijk, De Bilt, NL;
Richard Joseph Bruls, Eindhoven, NL;
Orlando Serapio Cicilia, Eindhoven, NL;
Hendrikus Alphonsus Ludovicus Van Dijck, Veldhoven, NL;
Gerardus Carolus Johannus Hofmans, Eindhoven, NL;
Tammo Uitterdijk, De Bilt, NL;
ASML Netherlands, B.V., Veldhoven, NL;
Abstract
A thick pellicle is allowed to have a non-flat shape and its shape is characterized to calculate corrections to be applied in exposures to compensate for the optical effects of the pellicle. The pellicle may be mounted so as to adopt a one-dimensional shape under the influence of gravity to make the compensation easier.