The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Aug. 22, 2005
Applicants:
Mikko Ritala, FIN-02140 Espoo, FI;
Antti Rahtu, FIN-02140 Espoo, FI;
Markku Leskela, FIN-02140 Espoo, FI;
Kaupo Kukli, FIN-02140 Espoo, FI;
Inventors:
Mikko Ritala, FIN-02140 Espoo, FI;
Antti Rahtu, FIN-02140 Espoo, FI;
Markku Leskela, FIN-02140 Espoo, FI;
Kaupo Kukli, FIN-02140 Espoo, FI;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/18 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method is provided for growing thin oxide films on the surface of a substrate by alternatively reacting the surface of the substrate with a metal source material and an oxygen source material. The oxygen source material is preferably a metal alkoxide. The metal source material may be a metal halide, hydride, alkoxide, alkyl, a cyclopentadienyl compound, or a diketonate.