The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2008
Filed:
Oct. 28, 2004
Joseph Yudovsky, Campbell, CA (US);
Avi Tepman, Cupertino, CA (US);
Kenneth R. Reynolds, Los Gatos, CA (US);
Younes Achkire, Los Gatos, CA (US);
Dan A. Marohl, San Jose, CA (US);
Steve G. Ghanayem, Los Altos, CA (US);
Alexander S. Polyak, San Jose, CA (US);
Gary Ettinger, Cupertino, CA (US);
Haochuan Zhang, Milpitas, CA (US);
Hui Chen, Burlingame, CA (US);
Joseph Yudovsky, Campbell, CA (US);
Avi Tepman, Cupertino, CA (US);
Kenneth R. Reynolds, Los Gatos, CA (US);
Younes Achkire, Los Gatos, CA (US);
Dan A. Marohl, San Jose, CA (US);
Steve G. Ghanayem, Los Altos, CA (US);
Alexander S. Polyak, San Jose, CA (US);
Gary Ettinger, Cupertino, CA (US);
Haochuan Zhang, Milpitas, CA (US);
Hui Chen, Burlingame, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A scrubber box is provided that includes a tank adapted to receive a substrate for cleaning, supports outside of the tank and adapted to couple to ends of scrubber brushes disposed within the tank, a motor mounted to each of the supports and adapted to rotate the scrubber brushes, a base to which the supports are pivotally mounted via spherical bearings adapted to permit toe-in of the scrubber brushes, a brush gap actuator adapted, via a crank and rocker mechanism, to substantially simultaneously pivot the supports toward or away from each other so as to permit the scrubber brushes to substantially simultaneously achieve or break contact with the substrate, and a toe-in actuator adapted to move two of the spherical bearings toward or away from each other so as to adjust a toe-in angle between the scrubber brushes.