The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2008
Filed:
May. 25, 2005
Paul Aoyagi, Sunnyvale, CA (US);
Leonid Poslavsky, Belmont, CA (US);
Paul Aoyagi, Sunnyvale, CA (US);
Leonid Poslavsky, Belmont, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
A method of determining actual properties of layered media. An incident beam of light is directed towards the layered media, such that the incident beam of light is reflected from the layered media as a reflected beam of light. The actual properties of the reflected beam of light are measured, and properties of the layered media are estimated. A mathematical model of the layered media based on a modal function expansion is solved with the estimated properties of the layered media to yield theoretical properties of the reflected beam of light. The eigenvalues of the modal functions are computed recursively by recasting the eigenvalue equation in the following form:β(β)where β=the eigenvalue of the irecursion and F is a function such that β=F(β) is mathematically identical to the eigenvalue equation.