The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2008
Filed:
Jul. 29, 2004
Satoru Oishi, Tochigi, JP;
Hideki Ina, Kanagawa, JP;
Takehiko Suzuki, Saitama, JP;
Koichi Sentoku, Tochigi, JP;
Takahiro Matsumoto, Tochigi, JP;
Satoru Oishi, Tochigi, JP;
Hideki Ina, Kanagawa, JP;
Takehiko Suzuki, Saitama, JP;
Koichi Sentoku, Tochigi, JP;
Takahiro Matsumoto, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A management apparatus which manages a parameter for an industrial device acquires AGA measurement results obtained by operating the industrial device with an operation job parameter value and non-operation job parameter value. An inspection apparatus acquires an 'inspection result' obtained by inspecting the result of operating the industrial device in the operation job. A change in inspection result upon a change in parameter value is estimated on the basis of the AGA measurement result and inspection result. A variable which minimizes (extreme) both or at least one of the sensitivity (slope) of the inspection result upon a change in parameter value and variations (3σ) in inspection result between objects to be processed (e.g., wafers) is set as an optimal parameter.