The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2008
Filed:
Sep. 21, 2006
Johannes Wangler, Konigsbronn, DE;
Karl-heinz Schuster, Konigsbronn, DE;
Alexander Sohmer, Oberkochen, DE;
Alexander Epple, Aalen, DE;
Christa Müller, Legal Representative, Welzheim, DE;
Jorg Schultz, Aalen, DE;
Johannes Wangler, Konigsbronn, DE;
Karl-Heinz Schuster, Konigsbronn, DE;
Alexander Sohmer, Oberkochen, DE;
Alexander Epple, Aalen, DE;
Christa Müller, legal representative, Welzheim, DE;
Jorg Schultz, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no more than 10 lenses with a combined total of no more than five aspheric lens surfaces. Each of the three portions of the REMA objective has one or two aspheric lens surfaces.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile