The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2008
Filed:
May. 30, 2007
Ruriko Tsuneta, Fuchu, JP;
Masanari Koguchi, Kunitachi, JP;
Takahito Hashimoto, Hitachinaka, JP;
Kuniyasu Nakamura, Musashino, JP;
Ruriko Tsuneta, Fuchu, JP;
Masanari Koguchi, Kunitachi, JP;
Takahito Hashimoto, Hitachinaka, JP;
Kuniyasu Nakamura, Musashino, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.