The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Jun. 17, 2004
Applicant:
Alexander Starikov, Palo Alto, CA (US);
Inventor:
Alexander Starikov, Palo Alto, CA (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods for monitoring and controlling process variables of interest during the substrate manufacturing process is provided. Numerical estimates for selected attributes of a feature of interest may be analyzed and applied in a numerical estimator to estimate the process variable of interest for a given product process run. The resulting estimations may be used to provide feedback control data for error correction on subsequent product substrate.