The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Apr. 13, 2005
Applicant:
Thomas Schletterer, Königsbronn, DE;
Inventor:
Thomas Schletterer, Königsbronn, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Closing module for an optical arrangement, in particular for an objective for microlithography, comprising an optically active closing element () having a first axis () and a holding device () that fixes the closing element () at least in the direction of the first axis (), the holding device () being configured for radial clamping of the closing element ().