The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Jan. 28, 2004
Applicants:
Ares J. Rosakis, Altadena, CA (US);
David Owen, Redondo Beach, CA (US);
Stephen Gledden, Fitzroy North, AU;
Sean Olson, Santa Monica, CA (US);
Inventors:
Ares J. Rosakis, Altadena, CA (US);
David Owen, Redondo Beach, CA (US);
Stephen Gledden, Fitzroy North, AU;
Sean Olson, Santa Monica, CA (US);
Assignee:
Ultratech, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.