The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2008

Filed:

Jan. 16, 2004
Applicants:

Peter Navratil, Tualatin, OR (US);

Brad Froemke, Portland, OR (US);

Craig Stewart, Bloxham, GB;

Anthony Lord, Banbury, GB;

Jeff Spencer, Vernonia, OR (US);

Scott Runbaugh, Tigard, OR (US);

Gavin Fisher, Chinnor, GB;

Pete Mccann, Beaverton, OR (US);

Rod Jones, Gaston, OR (US);

Inventors:

Peter Navratil, Tualatin, OR (US);

Brad Froemke, Portland, OR (US);

Craig Stewart, Bloxham, GB;

Anthony Lord, Banbury, GB;

Jeff Spencer, Vernonia, OR (US);

Scott Runbaugh, Tigard, OR (US);

Gavin Fisher, Chinnor, GB;

Pete McCann, Beaverton, OR (US);

Rod Jones, Gaston, OR (US);

Assignee:

Cascade Microtech, Inc., Beaverton, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

A probe station for testing a device under test. A first platen supporting an electrical probe. A chuck supporting the device under test. A second platen supporting an optical probe. The first platen and the second platen positioned above the device under test. A percentage of the top surface of the second platen terminating into free space.


Find Patent Forward Citations

Loading…