The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Sep. 06, 2002
Masami Yakabe, Tokyo, JP;
Masami Yakabe, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An electric potential fixing apparatus of the present invention is an electric potential fixing apparatus that is connected to a connection line () between two capacitances, the first capacitance () and the second capacitance () that is directly connected to the first capacitance, includes the first high resistance (), the second high resistance () that is connected directly to the first high resistance, a voltage dividing unit that outputs electric potential divided by the first high resistance and the second high resistance to the output terminal, the third capacitance () that is connected in parallel to at least either of the first high resistance and the second high resistance, and a voltage supply unit () operable to maintain constantly electric potential of the connection line between the two capacitances () and (), holding combined total electric charge quantity of the first capacitance and the second capacitance, and the output terminal of the voltage supply unit is connected to a signal line between the two capacitances.