The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 06, 2008

Filed:

Oct. 22, 2004
Applicants:

Yoshiaki Ikuta, Kanagawa, JP;

Noriyuki Agata, Fukushima, JP;

Inventors:

Yoshiaki Ikuta, Kanagawa, JP;

Noriyuki Agata, Fukushima, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C 3/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

A synthetic quartz glass for an optical member, which is to be used in an optical device employing an ArF excimer laser beam as a light source at an energy density of at most 2 mJ/cm/pulse or in an optical device employing a KrF excimer laser beam as a light source at an energy density of at most 30 mJ/cm/pulse, characterized in that the hydrogen molecule concentration is within a range of at least 1×10molecules/cmand less than 5×10molecules/cm.


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