The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2008
Filed:
Dec. 20, 2005
Dominik Olligs, Dresden, DE;
Torsten Mueller, Dresden, DE;
Karl-heinz Kuesters, Boxdorf, DE;
Veronika Polei, Dresden, DE;
Thomas Mikolajick, Dresden, DE;
Josef Willer, Riemerling, DE;
Dominik Olligs, Dresden, DE;
Torsten Mueller, Dresden, DE;
Karl-Heinz Kuesters, Boxdorf, DE;
Veronika Polei, Dresden, DE;
Thomas Mikolajick, Dresden, DE;
Josef Willer, Riemerling, DE;
Infineon Technologies AG, Munich, DE;
Abstract
A method for fabricating stacked non-volatile memory cells and non-volatile memory cell arrays are disclosed. A semiconductor wafer is provided having a charge-trapping layer and a conductive layer deposited on the surface of the semiconductor wafer. Using a mask layer on top of the conductive layer, contact holes are formed into which a contact fill material is deposited. A further conductive layer is deposited on the surface of the semiconductor wafer and is patterned so as to form word lines. The contact fill material is connected to a contact plug using the contact holes with the contact fill material as a landing pad.