The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2008
Filed:
Jan. 12, 2005
Hiroki Adachi, Kanagawa, JP;
Kazuo Nishi, Kanagawa, JP;
Masato Yonezawa, Kanagawa, JP;
Yukihiro Isobe, Yamanashi, JP;
Hisato Shinohara, Kanagawa, JP;
Hiroki Adachi, Kanagawa, JP;
Kazuo Nishi, Kanagawa, JP;
Masato Yonezawa, Kanagawa, JP;
Yukihiro Isobe, Yamanashi, JP;
Hisato Shinohara, Kanagawa, JP;
Semiconductor Energy Laboratory Co., Ltd., Kanagawa-ken, JP;
TDK Corporation, Tokyo, JP;
Abstract
The invention is aimed to prevent that fall of characteristic of a solar battery and producing yield caused by particles of powder condition generating from working part at laser beam process in the method producing the solar battery by laser beam process. The constitution of the invention is characterized by comprising: a first step forming the lower electrode and the semiconductor layer on the insulating substrate by laminating; a second step forming a protective film on surface of the semiconductor; a third step forming an opening portion at the semiconductor layer, or the semiconductor layer and the lower electrode by laser beam process after the second step; and a fourth step removing the protective film.