The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2008
Filed:
May. 22, 2006
Younes Achkire, Los Gatos, CA (US);
Julia Svirchevski, San Jose, CA (US);
Jonathan S. Frankel, San Jose, CA (US);
Kien-bang Lam, San Jose, CA (US);
Younes Achkire, Los Gatos, CA (US);
Julia Svirchevski, San Jose, CA (US);
Jonathan S. Frankel, San Jose, CA (US);
Kien-Bang Lam, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.