The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
Apr. 18, 2005
Richard Hsiao, San Jose, CA (US);
Quang Le, San Jose, CA (US);
Paul P. Nguyen, San Jose, CA (US);
Son Van Nguyen, Los Gatos, CA (US);
Mustafa Pinarbasi, Morgan Hill, CA (US);
Patrick R. Webb, San Jose, CA (US);
Howard G. Zolla, San Jose, CA (US);
Richard Hsiao, San Jose, CA (US);
Quang Le, San Jose, CA (US);
Paul P. Nguyen, San Jose, CA (US);
Son Van Nguyen, Los Gatos, CA (US);
Mustafa Pinarbasi, Morgan Hill, CA (US);
Patrick R. Webb, San Jose, CA (US);
Howard G. Zolla, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
The present invention presents a method for fabricating coil elements for magnetic write heads. A coil pattern is formed on a substrate using photolithographic techniques. The substrate is etched using reactive ion etching, creating a coil-shaped trench in the substrate. Thin film seed layers are deposited using ion beam deposition. The substrate is electroplated with metal filling the trenches with metal. The substrate is chemical mechanical polished to remove excess metal and planarize the air bearing surface of the write head.