The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
Dec. 09, 2005
Applicant:
William Clay Schluchter, Los Altos, CA (US);
Inventor:
William Clay Schluchter, Los Altos, CA (US);
Assignee:
Agilent Technologies, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
An interferometer can achieve a high dynamic range for measurements along vertical and horizontal directions using a first measurement channel providing a high dynamic range measurement of a path including components respectively parallel and perpendicular to the optics-object separation and a second measurement channel providing a high dynamic range measurement with just a perpendicular component. Further, using the same techniques at multiple locations around permits a high dynamic range for measurements of the degrees of freedom of an object.