The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2008
Filed:
Jun. 24, 2005
Applicants:
Takeshi Mizuno, Hitachi, JP;
Hiroki Kawada, Tsuchiura, JP;
Inventors:
Takeshi Mizuno, Hitachi, JP;
Hiroki Kawada, Tsuchiura, JP;
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/304 (2006.01);
U.S. Cl.
CPC ...
Abstract
A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the calibrating patterns so that the positioning of the specimen can be made to match the calibrating patterns to the measurement points.
Quick Actions:
Mizuno, Takeshi. (2008). Scanning electron microscope and cd measurement calibration standard specimen (U.S. Patent No. 7361898). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7361898
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