The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2008
Filed:
Nov. 30, 2005
Susumu Saito, Nirasaki, JP;
Hisashi Isozaki, Hasuda, JP;
Takashi Kakinuma, Edogawa-ku, JP;
Noritaka Nishioka, Toda, JP;
Akira Noda, Kounosu, JP;
Susumu Saito, Nirasaki, JP;
Hisashi Isozaki, Hasuda, JP;
Takashi Kakinuma, Edogawa-ku, JP;
Noritaka Nishioka, Toda, JP;
Akira Noda, Kounosu, JP;
Tokyo Electron Limited, Tokyo, JP;
Kabushiki Kaisha TOPCON, Tokyo, JP;
Abstract
A particle detecting method which is capable of detecting the number of low-speed particles accurately, and a storage medium storing a program for implementing the method. Intensity of scattered light generated when a light emitted into a gas stream is scattered by a particle is measured using a light receiving sensor at predetermined time intervals. A measuring time period for measuring the scattered light intensity is divided into measurement periods each defined as a predetermined time period, and a measured time point in each measurement period is selected at which a maximum value of the scattered light intensity measured is measured. The number of particles having passed by in front of the light receiving sensor is counted based on the measured time point selected in each measurement period.