The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2008
Filed:
Oct. 17, 2005
Prasanna Chitturi, Hillsboro, OR (US);
Liang Hong, Hillsboro, OR (US);
Craig Henry, Aloha, OR (US);
John Notte, Gloucester, MA (US);
Prasanna Chitturi, Hillsboro, OR (US);
Liang Hong, Hillsboro, OR (US);
Craig Henry, Aloha, OR (US);
John Notte, Gloucester, MA (US);
FEI Company, Hillsboro, OR (US);
Abstract
An improved method of measuring the three-dimensional surface roughness of a structure. A focused ion beam is used to mill a succession of cross-sections or 'slices' of the feature of interest at pre-selected intervals over a pre-selected measurement distance. As each cross-section is exposed, a scanning electron microscope is used to measure the relevant dimensions of the feature. Data from these successive 'slices' is then used to determine the three-dimensional surface roughness for the feature.