The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2008
Filed:
Jul. 18, 2003
Applicants:
Jeffrey A. Wilmer, Mesa, AZ (US);
Brian Alan Mcallister, Chandler, AZ (US);
Daniel A. Swan, Phoenix, AZ (US);
David E. Sitterud, Gilbert, AZ (US);
Inventors:
Jeffrey A. Wilmer, Mesa, AZ (US);
Brian Alan McAllister, Chandler, AZ (US);
Daniel A. Swan, Phoenix, AZ (US);
David E. Sitterud, Gilbert, AZ (US);
Assignee:
Celerity, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 15/02 (2006.01); B01F 15/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.