The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2008
Filed:
Mar. 07, 2002
Konrad Kapser, Munich, DE;
Peter Knittl, Kelheim, DE;
Ulrich Prechtel, Munich, DE;
Helmut Seidel, Starnberg, DE;
Sebastian Toelg, Walluf, DE;
Manfred Weinacht, Dettingen/Teck, DE;
Konrad Kapser, Munich, DE;
Peter Knittl, Kelheim, DE;
Ulrich Prechtel, Munich, DE;
Helmut Seidel, Starnberg, DE;
Sebastian Toelg, Walluf, DE;
Manfred Weinacht, Dettingen/Teck, DE;
Conti Temic microelectronic GmbH, Nuernberg, DE;
Abstract
A micromechanical capacitive acceleration sensor is described for picking up the acceleration of an object in at least one direction. The sensor includes a frame structure (), a sensor inertia mass () made of a wafer and movably mounted relative to the frame structure () about a rotation axis, and a capacitive pick-up unit () for producing at least one capacitive output signal representing the position of the sensor mass () relative to the frame structure (). The sensor inertia mass () has a center of gravity which offset relative to the rotation axis in a direction perpendicularly to a wafer plane for measuring accelerations laterally to the wafer plane. The sensor mass () and the frame structure () are made monolithically of one single crystal silicon wafer. A cover section () forms a common connector plane () for the connection of capacitor electrodes (). Torqueable elements () form an electrically conducting bearing device for the sensor mass ().