The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2008
Filed:
Dec. 29, 2004
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Pieter Willem Herman DE Jager, Rotterdam, NL;
Robert-han Munnig Schmidt, Hapert, NL;
Henri Johannes Petrus Vink, Delft, NL;
Johannes Jacobus Matheus Baselmans, Oirschot, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Pieter Willem Herman De Jager, Rotterdam, NL;
Robert-Han Munnig Schmidt, Hapert, NL;
Henri Johannes Petrus Vink, Delft, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic illumination apparatus and method includes receiving a plurality of source radiation beams from a plurality of corresponding radiation sources, deflecting the plurality of source radiation beams along a common beam path, thereby generating a projection beam of radiation, imparting the projection beam of radiation with a cross-section pattern, and projecting the patterned projection beam of radiation onto a target portion of a substrate.