The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2008
Filed:
Feb. 18, 2005
David Matthew Burtner, Fort Collins, CO (US);
Scott A. Townsend, Fort Collins, CO (US);
Daniel E. Siegfried, Fort Collins, CO (US);
Viacheslav V. Zhurin, Fort Collins, CO (US);
David Matthew Burtner, Fort Collins, CO (US);
Scott A. Townsend, Fort Collins, CO (US);
Daniel E. Siegfried, Fort Collins, CO (US);
Viacheslav V. Zhurin, Fort Collins, CO (US);
Veeco Instruments, Inc., Woodbury, NY (US);
Abstract
An ion source is cooled using a cooling plate that is separate and independent of the anode. The cooling plate forms a coolant cavity through which a fluid coolant (e.g., liquid or gas) can flow to cool the anode. In such configurations, the magnet may be thermally protected by the cooling plate. A thermally conductive material in a thermal transfer interface component can enhance the cooling capacity of the cooling plate. Furthermore, the separation of the cooling plate and the anode allows the cooling plate and cooling lines to be electrically isolated from the high voltage of the anode (e.g., using a thermally conductive, electrically insulating material). Combining these structures into an anode subassembly and magnet subassembly can also facilitate assembly and maintenance of the ion source, particularly as the anode is free of coolant lines, which can present some difficulty during maintenance.