The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Sep. 26, 2003
Richard G. Morton, San Diego, CA (US);
Bryan Moosman, San Marcos, CA (US);
Timothy S. Dyer, Oceanside, CA (US);
James A. Carmichael, Valley Center, CA (US);
Jiping Zhang, San Diego, CA (US);
Richard G. Morton, San Diego, CA (US);
Bryan Moosman, San Marcos, CA (US);
Timothy S. Dyer, Oceanside, CA (US);
James A. Carmichael, Valley Center, CA (US);
Jiping Zhang, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
Fluorine gas discharge laser electrodes and electrode systems that may comprise a plurality of current return tangs extending for less than the respective length of the second elongated gas discharge electrode. In addition electrodes may comprise a first discharge shaping magnet mounted in a first elongated gas discharge electrode and a second discharge shaping magnet mounted in a second elongated gas discharge electrode. Also is an electrode may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode and a pair of elongated high erosion regions on either side of the crown comprising a second material with a relatively higher erosion rate during gas discharge than that of the first material.