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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7339758 B1

PDFFull Text
Expired
Date of Patent:
Mar. 04, 2008

Filed:

Dec. 21, 2004

Etching method, a substrate with a plurality of concave portions, a microlens substrate, a transmission screen and a rear projection

Applicants:

Nobuo Shimizu, Suwa, JP;

Hideto Yamashita, Suwa, JP;

Makoto Ishii, Suwa, JP;

Inventors:

Nobuo Shimizu, Suwa, JP;

Hideto Yamashita, Suwa, JP;

Makoto Ishii, Suwa, JP;

Assignee:

Seiko Epson Corporation, , JP;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

Diane I Lee

Assistant Examiner:

Magda Cruz

Int. Cl.
CPC ...
G03B 21/56 (2006.01); G03B 21/60 (2006.01); G02B 7/00 (2006.01); B29D 11/00 (2006.01); B44C 1/22 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An etching method is disclosed. The etching method includes the steps of: preparing a substrateforming first and second filmseach having predetermined internal stress on the substrate so that the internal stresses of the first and second filmsare canceled out or reduced with each other; forming a plurality of initial holesin the first and second filmsto form a maskand forming a plurality of concave portionsin the substrateat portions corresponding to the plurality of initial holesby subjecting the substrateto an etching process using the mask

Find Patent Forward Citations

Shimizu, Nobuo. (2008). Etching method, a substrate with a plurality of concave portions, a microlens substrate, a transmission screen and a rear projection (U.S. Patent No. 7339758). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7339758

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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