The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Sep. 08, 2003
Doron Korngut, Modiin, IL;
Erez Admoni, Petah-Tikvah, IL;
Ofer Kadar, Jerusalem, IL;
Lev Haikoviz, Givatayim, IL;
Haim Feldman, Nof-Ayalon, IL;
Avishay Guetta, Rehovot, IL;
Doron Korngut, Modiin, IL;
Erez Admoni, Petah-Tikvah, IL;
Ofer Kadar, Jerusalem, IL;
Lev Haikoviz, Givatayim, IL;
Haim Feldman, Nof-Ayalon, IL;
Avishay Guetta, Rehovot, IL;
Other;
Abstract
Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.