The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Jul. 28, 2006
Viorel Ontalus, Danbury, CT (US);
Jeong Woo Nam, Poughquag, NY (US);
Yunsheng Song, Poughkeepsie, NY (US);
Viorel Ontalus, Danbury, CT (US);
Jeong Woo Nam, Poughquag, NY (US);
Yunsheng Song, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A tool with one or more chambers in a manufacturing system is identified as performing at or below an acceptable level by the following steps. Store process data from tools for each one of a plurality of individual processes for a processed object in a process database. Store tool performance data for each individual process for a processed object in a yield database. Develop statistics for similar tool sets associating data with each of the similar tool units. Generate yield numbers for each group of the similar tool units based upon the statistics. Identify poorly/well performing tool units by using the yield numbers.