The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Oct. 25, 2005
Martin M. Liphardt, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Jeffrey S. Hale, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Steven E. Green, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
John A. Woollam, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Jeffrey S. Hale, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Steven E. Green, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
John A. Woollam, Lincoln, NE (US);
J.A. Woollam Co., Inc., Lincoln, NE (US);
Abstract
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system further having at least one multi-element lens and optionally being present in an environmental control chamber.