The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Jul. 12, 2005
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Vladimir Vitalevitch Ivanov, Moscow, RU;
Evgenii Dmitreevitch Korob, Troitsk, RU;
Givi Georgievitch Zukavishvili, Troitsk, RU;
Robert Rafilevitch Gayazov, Troitsk, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
Konstantin Nikolaevitch Koshelev, Troitsk, RU;
Vladimir Vitalevitch Ivanov, Moscow, RU;
Evgenii Dmitreevitch Korob, Troitsk, RU;
Givi Georgievitch Zukavishvili, Troitsk, RU;
Robert Rafilevitch Gayazov, Troitsk, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A device for generating radiation or a source based on a discharge includes a cathode and an anode. The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories of the material may be elongated. A laser may be used to cause the discharge more easily. The laser may be directed on the anode of cathode or on a separate material located in between the anode and cathode.