The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Nov. 15, 2005
Juergen Frosien, Riemerling, DE;
Stefan Lanio, Erding, DE;
Gerald Schoenecker, Munich, DE;
Alan D. Brodie, Palo Alto, CA (US);
David A. Crewe, Sunnyvale, CA (US);
Juergen Frosien, Riemerling, DE;
Stefan Lanio, Erding, DE;
Gerald Schoenecker, Munich, DE;
Alan D. Brodie, Palo Alto, CA (US);
David A. Crewe, Sunnyvale, CA (US);
ICT Integrated Circuit Testing Gesselschaft, Heimstetten, DE;
Abstract
The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged articles.