The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Jun. 17, 2003
Applicants:
Ryuichi Matsuda, Takasago, JP;
Yuichi Kawano, Takasago, JP;
Masahiko Inoue, Kobe, JP;
Inventors:
Assignee:
Mitsubishi Heavy Industries, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 21/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention attracts a wafer, placed on a susceptor, toward the susceptorby the electrostatic attractive power of an electrostatic chuck electrode, varies the output voltage of a variable direct current power sourcefor the electrostatic chuck electrodewhile measuring the temperature of the waferby a temperature detection sensor; and detects the potential of the waferbased on the output voltage of the variable direct current power sourceat a time when the temperature of the waferpeaks.