The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Jun. 21, 2002
Mindi Xu, Naperville, IL (US);
Tay Sayasane, Aurora, IL (US);
Joseph E. Paganessi, Burr Ridge, IL (US);
Gregory M. Jursich, Clerendon Hills, IL (US);
Naoyuki Nakamoto, Himeji, JP;
Yukinobu Nishikawa, Yokohama, JP;
Herve E. Dulphy, Marseilles, FR;
Guillaume Rameau, Grenoble, FR;
Lorrin Honda, Oceanside, CA (US);
Mindi Xu, Naperville, IL (US);
Tay Sayasane, Aurora, IL (US);
Joseph E. Paganessi, Burr Ridge, IL (US);
Gregory M. Jursich, Clerendon Hills, IL (US);
Naoyuki Nakamoto, Himeji, JP;
Yukinobu Nishikawa, Yokohama, JP;
Herve E. Dulphy, Marseilles, FR;
Guillaume Rameau, Grenoble, FR;
Lorrin Honda, Oceanside, CA (US);
Air Liquide America Corporation, Houston, TX (US);
American Air Liquide, Inc., Fremont, CA (US);
Abstract
Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks. The invention also relates to a method for delivering an ultrapure chemical from a chemical container to a point of use, by connecting a chemical container block, containing an ultrapure chemical, to a chemical delivery block and introducing the ultrapure chemical to a point of use. The methods may also include the use of one or more integral blocks. The chemical delivery systems and methods of the invention may be used in a variety of applications. In particular, the invention may be used in electronics fabrication, optical fiber manufacture or semiconductor manufacture.