The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2008
Filed:
Apr. 21, 2004
Alexander Leybovich, Grove City, OH (US);
Alexander Leybovich, Grove City, OH (US);
Tosoh SMD, Inc., Grove City, OH (US);
Abstract
A method and apparatus for ultrasonically measuring the thickness of sputter targets of varying shapes. An immersion bubble () and transducer () provide pulses to a front surface () and a front surface/bonded surface () interface of a target. The pulses generate reflected echoes that are converted to electric signals. By measuring the difference in time that the electric signals occur the thickness of the target may be approximated to identify whether the thickness of the target is appropriate for use. The system includes a sputter track (), specimen (), chuck (), nozzle (), columns (), opening (), inlet (), cable (), gauge (), turret (), position (), remote PC controller (), electrical line (), and rear part ().