The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2008
Filed:
Sep. 29, 2005
Deming Shu, Darien, IL (US);
Jorg M. Maser, Oak Park, IL (US);
Barry Lai, Woodridge, IL (US);
Franz Stefan Vogt, Plainfield, IL (US);
Martin V. Holt, Chicago, IL (US);
Curt A. Preissner, Rosemont, IL (US);
Robert P. Winarski, Lockport, IL (US);
Gregory B. Stephenson, Lisle, IL (US);
Deming Shu, Darien, IL (US);
Jorg M. Maser, Oak Park, IL (US);
Barry Lai, Woodridge, IL (US);
Franz Stefan Vogt, Plainfield, IL (US);
Martin V. Holt, Chicago, IL (US);
Curt A. Preissner, Rosemont, IL (US);
Robert P. Winarski, Lockport, IL (US);
Gregory B. Stephenson, Lisle, IL (US);
UChicago Argonne, LLC, Chicago, IL (US);
Abstract
A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.