The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 19, 2008

Filed:

May. 10, 2004
Applicants:

Ludolf Gerdau, Elsdorf, DE;

Randolf Rolff, Kerpen-Horrem, DE;

Ralf Kilian, Köln, DE;

Inventors:

Ludolf Gerdau, Elsdorf, DE;

Randolf Rolff, Kerpen-Horrem, DE;

Ralf Kilian, Köln, DE;

Assignee:

Inficon GmbH, Cologne, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M 3/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

A leak rate measuring device contains a strip spectrometer in which the ion path of the respective gas is influenced by at least one variable influencing quantity. When a gas having a predetermined mass is detected, and leakages of a gas having other predetermined masses interfere with this detection due to lack of selectivity of the spectrometer, the influencing quantity is modulated in a sinusoidal manner, and the wanted signal is subsequently selected in a lock-in amplifier. This modulation enables, for example, the elimination of the interfering influence of underground water during the leak rate measurement while using helium as a test gas.


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