The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2008
Filed:
Jul. 09, 2004
Applicants:
William M. Goodwin, Medway, MA (US);
Oleg P. Kishkovich, Greenville, RI (US);
Anatoly Grayfer, Newton, MA (US);
Inventors:
William M. Goodwin, Medway, MA (US);
Oleg P. Kishkovich, Greenville, RI (US);
Anatoly Grayfer, Newton, MA (US);
Assignee:
Entegris, Inc., Chaska, MN (US);
Primary Examiner:
Int. Cl.
CPC ...
B01D 47/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to systems and methods for controlling humidity and temperature in gases or air streams used in semiconductor processing systems. These systems and methods can be used in combination with systems and methods for contaminant detection and removal.