The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
Jun. 06, 2005
John A. Woollam, Lincoln, NE (US);
Steven E. Green, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Galen L. Pfeiffer, Lincoln, NE (US);
Brian D. Guenther, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
Gerald T. Cooney, Lincoln, NE (US);
John A. Woollam, Lincoln, NE (US);
Steven E. Green, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
Blaine D. Johs, Lincoln, NE (US);
Craig M. Herzinger, Lincoln, NE (US);
Galen L. Pfeiffer, Lincoln, NE (US);
Brian D. Guenther, Lincoln, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
Gerald T. Cooney, Lincoln, NE (US);
J.A. Woollam Co., Inc., Lincoln, NE (US);
Abstract
Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.