The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
Aug. 09, 2004
Applicants:
Jonathan Frank, Los Gatos, CA (US);
Daniel Cotton, Walnut Creek, CA (US);
Inventors:
Jonathan Frank, Los Gatos, CA (US);
Daniel Cotton, Walnut Creek, CA (US);
Assignee:
Credence Systems Corporation, Milpitas, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/01 (2006.01); G01N 21/55 (2006.01); G01B 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system for orthogonal alignment of a specimen disclosed. The system includes a light-beam illumination source, collection optics, imaging optics, and a tiltable specimen holder. The light-beam source is activated to illuminate a spot on the specimen, and the imaging optics is used image that spot. The location of the spot on the imager is used to determine whether the specimen is orthogonal to the optical axis of the collection optics.