The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2008
Filed:
Nov. 26, 2002
Applicant:
Masatoshi Nanjo, Tokyo, JP;
Inventor:
Masatoshi Nanjo, Tokyo, JP;
Assignee:
Disco Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65D 85/30 (2006.01); B05C 13/02 (2006.01); A47G 19/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A cassette for storing a plurality of semiconductor wafers with a space in the vertical direction has a plurality of support plates which are provided spaced apart from one another in the vertical direction. A receiving cut-out having a shape corresponding to the shape of an adsorber for suction-holding a semiconductor wafer are formed in the front half portion of each of the support plates. The cassette further comprises separation plates between adjacent support plates.