The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2008
Filed:
Jun. 15, 2005
Martinus Cornelis Reijnen, Tilburg, NL;
Andrej Makarovic, Veldhoven, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
Stoyan Nihtianov, Eindhoven, NL;
Petrus Wilhelmus Josephus Maria Kemper, Waalre, NL;
Kamen Hristov Chilov, Eindhoven, NL;
Martinus Cornelis Reijnen, Tilburg, NL;
Andrej Makarovic, Veldhoven, NL;
Lambertus Gerardus Maria Kessels, Aalst-Waalre, NL;
Stoyan Nihtianov, Eindhoven, NL;
Petrus Wilhelmus Josephus Maria Kemper, Waalre, NL;
Kamen Hristov Chilov, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The present invention comprises a lithographic apparatus and device manufacturing method method that uses a patterning device that increase a number of individually controllable elements that are programmed simultaneously to increase an update rate of an array of individually controllable elements. A number of required high speed analog inputs to the array is reduced. The complexity of the array is reduced and the maximum update speed of the array is increased. Furthermore, the number of elements within an array can be readily expanded. The patterning device can be divided into a plurality of groups of cells and the lithographic apparatus can comprise a plurality of supply channels. Each supply channel can be arranged to provide a voltage signal to each cell in a respective group of cells. This can reduce the number of required inputs to the patterning device for individually addressing each cell.